Quantum Material Fabrication

Cleanroom facilities with more than 150 state-of-the-art tools and equipment, ranging from atomic scale resolution transmission electron microscopes to a deep UV lithography stepper tool used for commercial chip production. Equipment for handling and bonding.

Multiple material systems;

  • Processing of silicon as well as III-V materials, deposition of a wide range of materials using ALD (atomic layer deposition), PECVD (plasma enhanced vapor deposition), LPCVD (low pressure chemical vapor deposition), PVD (physical vapor deposition), MOVPE (metal organic vapor phase epitaxy
  • Molecular Beam Epitaxy (MBE) ultra-high vacuum system for growth of III-V semiconductor compounds and in-situ hybridization with superconductors 

For detailed information on capabilities and access, contact us or explore the test sites by yourself:

 

  • Metrology Development
  • Measurement standards and
  • Calibration
  • Metrology experts

DFM

 

 

  • DTU1350m2 Cleanroom (ISO 4)
  • Electron Microscopes and Electron Beam Lithography (SEM(TEM/EBL)
  • Optical Testbeds
  • Supports up to 6” wafer fab
  • ISO 9001 certified
  • Process and microscopy specialists

 

 

  • Optical characterization
  • Ion traps
  • Cold atoms
  • Laser cooling facilities
  • Specialists available within lasers/optics/photonics

 

 

  • University of CopenhagenCleanroom (ISO 7)
  • Electron Microscopes and Electron Beam Lithography (SEM(TEM/EBL)
  • Electrical and Optical Characterization
  • Electrical and Mechanical Workshop
  • Agile with fast feedback, ideal for small chips
  • Process and microscopy specialists

 

  • 3D imaging using x-rays and neutrons. DTU